The 423 IMAG is an inverted magnetron cold cathode gauge with a measurement range from 1e-11 to 1e-2 Torr.
Features
- Wide pressure measurement range 10-11 to 10-2 Torr
- No adjustment in emission current or filament voltage required
- No need to degas the gauge and no filaments to burn out
- Sensor tubes can be mounted in any position without affecting reading
- Cleaning of sensor is easy with a demountable tube
Applications
- Industrial
- PVD
- Mass Spec
- High Energy Physics
- Ion Implantation
Specifications Table
Model | 423 I-MAG |
---|---|
Technology |
Cold Cathode
|
Measurements |
Torr Min: 1.000 x 10-11 Max: 1.000 x 10-2 mbar Min: 1.000 x 10-11 Max: 1.000 x 10-2 |
Temperature |
Operating 70.0 ºC 158 ºF Storage 50.0 ºC 122 ºF Bakeout 400 ºC 752 ºF |
Materials Exposed to Vacuum |
6061 Aluminum Alumina Ceramic Glass Inconel Stainless Steel |
Connectors |
Bayonet Connector and Threaded Coaxial Connector |
Typical Accuracy |
±30% of reading
|
Accuracy Range |
1 to 10%
|
Recommended Mounting Orientation |
Any
|
Compliance and Standards |
CE
RoHS |
X CLOSE
Remote Controllers
946 Vacuum System Controller
Versatile vacuum controller that supports a wide variety of pressure sensors, MFC's, and valves for system control.
Features and Benefits:
- Simultaneous control and readout for up to six MFC's and/or vacuum gauges
- Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
- Pressure readings from 1,000 Torr down to 10-11 Torr, eliminating the need for individual electronics for each sensor
- 12 set point relays included in the base unit for system control flexibility
- Standalone controller
Power Supply and Readouts | 946 Vacuum System Controller |
Display Type | 320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position. |
Channels | 6 of any combination below. MKS MFC's*MKS Baratrons*, MKS Piranis*, MKS Convectron/Convection Series*, MKS Hot and Cold Cathode Sensors*, MKS Pressure Control Valves* |
Setpoint Relays | Yes |
Power Input | 150 watts maximum 100 - 240 VAC 50/60 Hz |
Approximate List Price | $1814 to $5877 (region specific power cable included) (interface cables not included) |
Gas Correction Factors for Ionization Vacuum Gauges
The values in the following table are the gas correction factors for various gases with respect to Nitrogen for both hot cathode and cold cathode ionization vacuum gauges.
In a gauge calibrated for Nitrogen, where the predominant gas being measured is other than Nitrogen, divide the actual gauge reading by the appropriate gas correction factor to get the corrected pressure value for the specific gas being measured.
Gas | Symbol | Gas Correction Factor |
---|---|---|
Acetone | (CH3)2CO | 3.60 |
Air | - | 1.00 |
Ammonia | NH3 | 1.30 |
Argon | Ar | 1.29 |
Benzene | C6H6 | 5.90 |
Bromine | Br2 | 3.80 |
Bromomethane | CH3Br | 3.70 |
Carbon Dioxide | CO2 | 1.42 |
Carbon Disulfide | CS2 | 5.00 |
Carbon Monoxide | CO | 1.05 |
Carbon Tetrachloride | CCl4 | 6.00 |
Chlorine | Cl2 | 0.68 |
Deuterium | D2 | 0.35 |
Helium | He | 0.18 |
Hydrogen | H2 | 0.46 |
Hydrogen Bromide | HBr | 2.00 |
Hydrogen Chloride | HCl | 1.50 |
Hydrogen Fluoride | HF | 1.40 |
Isobutylene | C4H8 | 3.60 |
Krypton | Kr | 1.94 |
Methane | CH4 | 1.40 |
Neon | Ne | 0.30 |
Nitric Oxide | NO | 1.30 |
Nitrogen | N2 | 1.00 |
Nitrogen Oxide | NO | 1.16 |
Nitrous Oxide | N2O | 1.50 |
Oxygen | O2 | 1.01 |
Phosphine | PH3 | 2.60 |
Propane | C3H8 | 4.20 |
Sulfur Dioxide | SO2 | 2.10 |
Sulfur Hexafluoride | SF6 | 2.50 |
xenon | xe | 2.87 |
Gas | Symbol | Gas Correction Factor |
Ordering Table
X CLOSE
Description | Technology | Flange |
|
Part Number | Price | In Stock | Add To Cart | ||||
---|---|---|---|---|---|---|---|---|---|---|---|
Description | Technology | Flange |
|
Part Number | Price | In Stock | Add To Cart | ||||
GAUGE I-MAG COLD CATHODE SENSOR NWKF40 AIR, |
Cold Cathode | KF40 |
|
|
$546.00 | ||||||
GAUGE, |
Cold Cathode | DN40CF |
|
|
$596.00 | ||||||
- | Cold Cathode | 1" OD Tube |
|
|
P.O.R. | ||||||
GAUGE, |
Cold Cathode | KF25 |
|
|
$431.00 |