Transfer Valve Monovat Direct (Series 022)

For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers.

Transfer Valve L-motion (Series 043)

For load lock and process chamber isolation in semiconductor production systems. Especially suited for corrosive processes such as etch or CVD.

Atmospheric Door L-VAT (Series 075)

For load lock and process chamber isolation on the atmospheric side of semiconductor production systems.