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Agilent (Varian) Diffusion Pumps

Because of its simplicity, high performance and low initial cost, the diffusion pump is the primary industrial high vacuum pumping mechanism. Agilent diffusion pumps offer high pumping speeds, high throughput, high tolerance forepressure, excellent backstreaming characteristics, low ultimate pressure, and long-term reliability. The full fractionating design allows vaporized fluid to be fractionated in the boiler and jet assembly. Contamination and decomposition products are pumped away and only the purest vapor reaches the top jet, assuring highest speed and lowest backstreaming. The foreline ejector stage provides high tolerance for pressure and a large surface area for efficient degassing of compressed fluid, while the foreline baffle minimizes fluid loss, even under high throughput conditions.

HS2 Model : High speed, low ultimate pressure, high throughput, high tolerable forepressure, and low backstreaming combine with low cost to make HS2 an excellent choice for your diffusion pump needs. Equipped with full thermal protection and quick cool coils.

VHS Series : Fast and clean diffusion pumps for their size, these pumps have a sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid.

Dimensional Drawings

Charts

Specifications Table

Pump Model	VHS-4	VHS-6	VHS-10
Pumping Speeds	N2: 750 L/s He: 940 L/s H2: 940 L/s	N2: 1550 L/s He: 1930 L/s H2: 1930 L/s	N2: 3650 L/s He: 4560 L/s H2: 4560 L/s
Ultimate Pressure	Ultimate 6.50 x 10^-9 mbar 4.88 x 10^-9 Torr	Ultimate 6.50 x 10^-9 mbar 4.88 x 10^-9 Torr	Ultimate 6.50 x 10^-9 mbar 5.00 x 10^-9 Torr
Max Foreline Pressure	7.30 x 10^-1 mbar 5.50 x 10^-1 Torr	7.30 x 10^-1 mbar 5.50 x 10^-1 Torr	7.20 x 10^-1 - 7.30 x 10^-1 mbar 5.50 x 10^-1 Torr
Max Start Pressure	2.70 x 10^-3 mbar 2.03 x 10^-3 Torr	2.00 x 10^-3 mbar 1.50 x 10^-3 Torr	2.30 x 10^-3 - 2.30 x 10^-1 mbar 1.70 x 10^-3 - 1.73 x 10^-1 Torr
Cooling Method(s)	Method Water Water Flow Rate 0.15 gal/min 30 L/hr	Method Water Water Flow Rate 0.25 gal/min 50 L/hr	Method Water Water Flow Rate 0.4 gal/min 80 L/hr
Foreline Flange	KF40	KF50	ISO63-K 2" ASA ISO63
Inlet Flange	4" ASA	6" ASA	10" ASA ISO320-K
Oil Capacity Quarts (Liters) *Unless otherwise noted	0.30 ( 0.30 )	0.53 ( 0.50 )	1.05 - 1000 ( 1.00 - 1.00 )
Weight Lbs (kg)	55.0 ( 25.0 )	74.8 ( 34.0 )	149 - 150 ( 68.0 - 68.0 )
Lubrication Type	Wet	Wet	Wet
Technology Type	Diffusion	Diffusion	Diffusion

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Specifications Table

Pump Model	HS-2	HS-16	HS-20	HS-32
Pumping Speeds	N2: 160 L/s He: 200 L/s H2: 200 L/s	N2: 6000 L/s He: 7500 L/s H2: 7500 L/s	N2: 10000 L/s He: 12500 L/s H2: 12500 L/s	N2: 17300 L/s He: 21625 L/s H2: 21625 L/s
Ultimate Pressure	Ultimate 6.50 x 10^-8 mbar 4.88 x 10^-8 Torr	Ultimate 5.00 x 10^-8 mbar 3.75 x 10^-8 Torr	Ultimate 5.00 x 10^-8 mbar 3.75 x 10^-8 Torr	Ultimate 5.00 x 10^-8 mbar 3.75 x 10^-8 Torr
Max Foreline Pressure	5.20 x 10^-1 mbar 4.00 x 10^-1 Torr	7.20 x 10^-1 mbar 5.50 x 10^-1 Torr	7.20 x 10^-1 mbar 5.50 x 10^-1 Torr	4.50 x 10^-1 mbar 3.50 x 10^-1 Torr
Max Start Pressure	4.90 x 10^-3 mbar 3.68 x 10^-3 Torr	2.00 x 10^-3 mbar 1.50 x 10^-3 Torr		1.70 x 10^-3 mbar 1.28 x 10^-3 Torr
Cooling Method(s)	Method Water Water Flow Rate 0.1 gal/min 20 L/hr	Method Water Water Flow Rate 1.5 gal/min 300 L/hr	Method Water Water Flow Rate 90 gal/min 300 L/hr	Method Water Water Flow Rate 4 gal/min 800 L/hr
Foreline Flange	0.84" Diam Tube	ISO63-K	ISO63-K	ISO63-K
Inlet Flange	2" ASA	16" ASA	20" ASA	32" ASA
Oil Capacity Quarts (Liters) *Unless otherwise noted	0.11 ( 0.10 )	2.95 ( 2.80 )	4.97 ( 4.70 )	11.9 ( 11.3 )
Weight Lbs (kg)	19.8 ( 9.00 )	480 ( 218 )	580 ( 264 )	1350 ( 612 )
Lubrication Type	Wet	Wet	Wet	Wet
Technology Type	Diffusion	Diffusion	Diffusion	Diffusion

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Ordering Table

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Pump Model	Inlet Flange	Foreline Flange	Voltage & Phases	Oil Prep	Manual	Remanufactured KJLC Remanufactured	Description	Part Number	Price	In Stock	Add To Cart	Accessories
Pump Model	Inlet Flange	Foreline Flange	Voltage & Phases	Oil Prep	Manual	Remanufactured KJLC Remanufactured	Description	Part Number	Price	In Stock	Add To Cart	Accessories
HS-20	20" ASA	ISO63-K	—	—	—	KJLC Remanufactured	EUDF Remanufactured, Agilent HS-20 Diffusion Pump with 20" ASA inlet flange, 12500 L/s, Water cooling, 480VAC, 3-Ø, 12 Month Warranty SN#:	84341319-R	$19,150.00
HS-20	20" ASA	ISO63-K	480 VAC, Three Phase	—		—	EUDF Agilent HS-20 Diffusion Pump with 20" ASA inlet flange, 10000 L/s, Water cooling, 480 VAC, 3-Ø	DPD10000SGA	$25,676.00
VHS-6	6" ASA	KF50	120 VAC, Single Phase	—		—	EUDF Agilent VHS-6 Diffusion Pump with 6" ASA inlet flange, 1550 L/s, Water cooling, 120 VAC, 1-Ø	DPD1550SAA	$9,283.00
VHS-6	6" ASA	KF50	240 VAC, Single Phase	—		—	EUDF Agilent VHS-6 Diffusion Pump with 6" ASA inlet flange, 1550 L/s, Water cooling, 240 VAC, 1-Ø	DPD1550SCA	$9,283.00
HS-2	2" ASA	0.84" Diam Tube	120 VAC, Single Phase	—		—	EUDF Agilent HS-2 Diffusion Pump with 2" ASA inlet flange, 160 L/s, Water cooling, 120 VAC, 1-Ø	DPD160SAA	$4,983.00
HS-2	2" ASA	0.84" Diam Tube	240 VAC, Single Phase	—		—	EUDF Agilent HS-2 Diffusion Pump with 2" ASA inlet flange, 160 L/s, Water cooling, 240 VAC, 1-Ø	DPD160SCA	$4,983.00
HS-32	32" ASA	ISO63-K	480 VAC, Three Phase	—		—	EUDF Agilent HS-32 Diffusion Pump with 32" ASA inlet flange, 17300 L/s, Water cooling, 480 VAC, 3-Ø	DPD17300SGA	$41,077.00
VHS-10	10" ASA	ISO63-K	480 VAC, Three Phase	—		—	EUDF Agilent VHS-10 Diffusion Pump with 10" ASA inlet flange, 3650 L/s, Water cooling, 480 VAC, 3-Ø	DPD3650SGA	$16,164.00
HS-16	16" ASA	ISO63-K	480 VAC, Three Phase	—		—	EUDF Agilent HS-16 Diffusion Pump with 16" ASA inlet flange, 6000 L/s, Water cooling, 480 VAC, 3-Ø	DPD6000SGA	$19,095.00
VHS-4	4" ASA	KF40	120 VAC, Single Phase	—		—	EUDF Agilent VHS-4 Diffusion Pump with 4" ASA inlet flange, 750 L/s, Water cooling, 120 VAC, 1-Ø	DPD750SAA	$7,290.00
VHS-4	4" ASA	KF40	240 VAC, Single Phase	—		—	EUDF Agilent VHS-4 Diffusion Pump with 4" ASA inlet flange, 750 L/s, Water cooling, 240 VAC, 1-Ø	DPD750SCA	$7,290.00
VHS-10	ISO320-K	2" ASA,ISO63	208/240/380/480 VAC 50/60 Hz, 3-Ø	DC704		KJLC Remanufactured	Remanufactured, Agilent VHS-10 Diffusion Pump with ISO320-K inlet flange, 3650 L/s, Water cooling, 208/240/380/480 VAC 50/60 Hz, 3-Ø, Mains Cable Not Included, 12 Month Warranty SN#:	L5920309-R	$12,050.00

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