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Heater Module Questionnaire

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	Gas	Partial Pressure (mbar or torr)	Temperature	Duration
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4.
5.
6.

Heater Module Questionnaire

Application Details

What is the application? (please state if the application includes deposition)

Sample Sizes

Sample Shape

Does sample have its own holder?

Is the sample 'self-supporting?'

Other Sample Details

What are the sample materials?

What is the systems ultimate pressure requirement?

What maximum temperature (T°C)do you wish to heat the samples to in vacuum?

For how long will the sample be heated at this maximum temperature?

What type of thermocouples do you require?

Gas

Partial Pressure
(mbar or torr)

Temperature

Duration

Are any of the following incompatible with your process?

Additional comments, requirements, sketches and information?

Heater Module Questionnaire

Application Details

What is the application? (please state if the application includes deposition)

Sample Sizes

Sample Shape

Does sample have its own holder?

Is the sample 'self-supporting?'

Other Sample Details

What are the sample materials?

What is the systems ultimate pressure requirement?

What maximum temperature (T°C)do you wish to heat the samples to in vacuum?

For how long will the sample be heated at this maximum temperature?

What type of thermocouples do you require?

Gas

Partial Pressure(mbar or torr)

Temperature

Duration

Are any of the following incompatible with your process?

Additional comments, requirements, sketches and information?

Partial Pressure
(mbar or torr)