Applications
- Semiconductor industry
- Large area coating
- Solar industry
- Accelerators
- Vacuum components
- Laser technology
- Ultrapure media supply
- Electronics
- Aeronautics
- Medical technology
Features
- High maneuverability and compact design which includes a rotatable color touch screen
- Superior leak testing performances
- High roughing capacity (35 m3/h) for fast evacuation
- Dry and clean pumping technology
- Low maintenance requirements
- Ergonomic design with working surface
- Fast recovery in case of pollution
- Intuitive menu for easy operation
- Integrated toolbox for storage of accessories
- Fast startup
- High sensitivity and accurate measurements
- Fully Semi S2 compliant
Specifications Table
Leak Detector Model | ASM 390 | ASM 392 |
---|---|---|
Pumping Speed |
He
10.0 L/s
Rough
20.6 CFM
35.0 m3/hr
|
He
23.0 -
25.0 L/s
Rough
20.6 CFM
35.0 m3/hr
|
Run Up Time |
< 120 seconds
|
< 120 seconds
|
Inlet Flange |
KF40
|
KF40
|
Smallest Detectable Leak Rate |
Helium
Vacuum Operation
< 1 x 10-12
mbar*L/s
Helium
Sniffer Mode
< 1 x 10-10
mbar*L/s
|
Helium
Vacuum Operation
< 1 x 10-12
mbar*L/s
Helium
Sniffer Mode
< 1 x 10-10
mbar*L/s
|
Units of Measurement |
Pressure
mbar*L/s
Pa
atm
Torr
Leak Rate
mbar*L/s
Pa*m^3/s
atm*cc/s
Torr*L/s
s*ft^3/yr
|
Pressure
mbar*L/s
Pa
atm
Torr
Leak Rate
mbar*L/s
Pa*m^3/s
atm*cc/s
Torr*L/s
s*ft^3/yr
|
Inlet Pressure |
max
15.0 mbar
2000 Pa
20.0 hPA
15.0 Torr
|
max
15.0 mbar
2000 Pa
20.0 hPA
15.0 Torr
|
Languages |
English
French
German
Chinese
Japanese
Korean
Spanish
Russian
Italian
|
English
French
German
Chinese
Japanese
Korean
Spanish
Italian
Russian
|
Power Consumption W |
1600
|
1600
|
Dimensions in. (mm.) |
42.2 x 17.9 x 40.4
( 1072 x 455 x 1025 )
|
42.2 x 17.9 x 40.4
( 1072 x 455 x 1025 )
|
Weight Lbs (kg) |
275
( 125 )
|
286
( 130 )
|
X CLOSE