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Linear Magnetron Questionnaire

1.) Is this for an existing or new chamber?

Existing Chamber

New Chamber

2.) What target size do you require?

Target width?

3.5" 5" 6"

Custom:

Target length?

3.) What target materials will you be sputtering?

4.) What power will you be using? (Select all that apply)

DC or Pulsed DC

HIPIMS

14.) Is this for a reactive process?

Yes

If so, what gases will be used?

15.) Do you require any additional accessories? (Select all that apply)

Flex Mount

Shutter

Gas Inlet

Chimney

Power Supply

Target Materials

None

16.) How many magnetrons do you require?

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5.) What mounting configuration do you require?
	Internal (Do you have any overall size requirements?)	External (Do you have a flange size requirement?)

	Custom (Please provide details)

6.) What is the size of the substrate you will be coating?	7.) Is the substrate moving or rotating?
	Moving	Rotating