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Alicat MC Series Mass Flow Controllers
Description: Mass flow controllers are a pivotal tool when it comes to any process, which means that you need something fast, reliable, and accurate. The Alicat MC Pressure-based Mass Flow Controllers provide a large control range (0.01-100%), fast sensor response time (<1 ms), and an exceptional accuracy. With a plethora of additional options and customizations including different electrical connections and communication protocols, the Alicat Mass Flow Controller line will provide everything that you need to ensure that your vacuum process runs smoothly.
Features & Benefits
- ±0.6% of reading or ±0.1% of full scale, whichever is greater
- Wide control range of 0.01-100% of full scale on most devices
- Multi gas compatibility
- Multi-variate measurement (Pressure, Temperature, Mass flow and Volumetric flow)
- Inbuilt display
- < 1 ms sensor response time
- Typical control response time of 30 ms
- No warm-up time
- Industrial protocols available
- Pressure and temperature compensation
Dimensional Drawings
Specifications Table
| Type | MC Series | MCS - Corrosive |
|---|---|---|
| Full Scale Flow Ranges | 100 - 20,000 sccm | 100 - 20,000 sccm |
| Maximum Inlet Pressure | 145 psig | 145 psig |
| Normal Operating | 11.5 PSIA Minimum | 11.5 PSIA Minimum |
| Pressure Differential | max 75 psid | max 75 psid |
| Proof Pressure | 175 psig | 175 psig |
| Control Range | 0.01% to 100% Full Scale / 200:1 Turndown | 1% to 100% Full Scale / 100:1 Turndown |
| Typical Accuracy after tare | 0.5 sccm to 5 sccm: ±0.8% of reading and ±0.2% of full scale 10 sccm to 20 slpm: ± (0.6% of Reading or 0.1% of Full Scale), whichever is greater | 0.5 sccm to 5 sccm: ±0.8% of reading and ±0.2% of full scale 10 sccm to 20 slpm: ± (0.6% of Reading or 0.1% of Full Scale), whichever is greater |
| Typical Response time | 0.5 sccm to 5 sccm: 100 msec 10 sccm to 20 slpm: 30 msec | 0.5 sccm to 5 sccm: 100 msec 10 sccm to 20 slpm: 30 msec |
| Repeatability | ± 0.2% of Full Scale | ± 0.2% of Full Scale |
| Warm-up Time | <1s | <1s |
| Operating Temperature Range | -10°C to 60°C | -10°C to 60°C |
| Storage Humidity | 0 to 100% Relative Humidity, Non-Condensing | 0 to 100% Relative Humidity, Non-Condensing |
| External Leak Rate | 1.6e-3 atm-cc/sec at test pressure of 103.5 PSIA | 1.6e-3 atm-cc/sec at test pressure of 103.5 PSIA |
| Internal Leak Rate (leak through) | 3.3e-3 atm-cc/sec at test pressure of 103.5 PSIA | 3.3e-3 atm-cc/sec at test pressure of 103.5 PSIA |
| Input Power Required | +12 to +30 VDC | +12 to +30 VDC |
| Selectable Gases | 98 standard gases | 128 gases, includes corrosives |
| Electrical Connector Options | 8-Pin Mini-DIN / 15-pin D-sub (DB15K) | 8-Pin Mini-DIN / 15-pin D-sub (DB15K) |
| Digital Input / Output Options | RS-485 Serial | RS-485 Serial |
| Analog Output | 0-5 VDC | 0-5 VDC |
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Downloads & Documents
View information regarding your product.
Manuals
Datasheets
Spec Sheets
Ordering Table
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| Type | Description | Seal | Flow Range | Connections | Fittings | Connector | Output | Part Number | Price | In Stock | Add Item | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Type | Description | Seal | Flow Range | Connections | Fittings | Connector | Output | Part Number | Price | In Stock | Add Item | |
| N2 |
MASS FLOW CONTROLLER, |
Elastomer | 100 SCCM | 8 pin / barrel (power) | 1/8" FNPT | Analog / RS485 | 0 to 5 VDC |
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| N2 |
MASS FLOW CONTROLLER, |
Elastomer | 100 SCCM | DB15K Male / barrel (power) | 1/8" FNPT | Analog / RS485 | 0 to 5 VDC |
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| N2 |
MASS FLOW CONTROLLER, |
Elastomer | 1000 SCCM | 8 pin / barrel (power) | 1/8" FNPT | Analog / RS485 | 0 to 5 VDC |
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| N2 |
MASS FLOW CONTROLLER, |
Elastomer | 1000 SCCM | DB15K Male / barrel (power) | 1/8" FNPT | Analog / RS485 | 0 to 5 VDC |
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| N2 |
MASS FLOW CONTROLLER, |
Elastomer | 2000 SCCM | 8 pin / barrel (power) | 1/8" FNPT | Analog / RS485 | 0 to 5 VDC |
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| N2 |
MASS FLOW CONTROLLER, |
Elastomer | 2000 SCCM | DB15K Male / barrel (power) | 1/8" FNPT | Analog / RS485 | 0 to 5 VDC |
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| N2 |
MASS FLOW CONTROLLER, |
Elastomer | 5000 SCCM | 8 pin / barrel (power) | 1/8" FNPT | Analog / RS485 | 0 to 5 VDC |
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| N2 |
MASS FLOW CONTROLLER, |
Elastomer | 5000 SCCM | DB15K Male / barrel (power) | 1/8" FNPT | Analog / RS485 | 0 to 5 VDC |
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Accessories Table
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| Description | Reference | Type | Part Number | Price | In Stock | Add Item | |
|---|---|---|---|---|---|---|---|
| Description | Reference | Type | Part Number | Price | In Stock | Add Item | |
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FITTING, |
1/4" MVCR to 1/8" MNPT adaptor | Adaptor |
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| — | CABLE, DB15F TO DB15F, 15FT. | Cable |
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| — | CABLE, DB15F TO BLUNT CUT, 15FT. | Cable |
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| — | CABLE, 8 PIN TO BLUNT CUT, 25FT | Cable |
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| — | CABLE, DOUBLE ENDED 8 PIN DIN, CONNECTION TO BB3 AND BB9, 3 FT. | Cable |
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| — | CABLE, 8 PIN TO BLUNT CUT, 50FT | Cable |
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| — | CABLE, 8 PIN TO BLUNT CUT, 6FT | Cable |
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| — | CABLE, DOUBLE ENDED 8 PIN DIN, CONNECTION TO BB3 AND BB9, 6 FT. | Cable |
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IN-LINE FILTER, |
IN-LINE FILTER 1/8" NPT 20 MICRONS | Filter |
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NUT, |
1/4" MVCR SS Nut | Hardware |
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POWER SUPPLY, |
UNIVERSAL POWER SUPPLY | Power Supply |
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| — | UNIVERSAL POWER SUPPLY FOR MICRO-USB | Power Supply |
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| — | BB3 RS232 BREAKOUT BOW FOR 3 MFCS, POWER AND COMMUNICATION, 8 PIN DIN CONNECTOR, CABLES AND POWER SUPPLY NOT INCLUDED | Power Supply / Communication |
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| — | BB3 RS232 BREAKOUT BOX KIT, 8 PIN CONNECTORS, INCLUDES BB3, 3X 6FT. 8 PIN CABLE FOR DIGITAL COM AND POWER, AND UNIVERSAL POWER SUPPLY. | Power Supply / Communication |
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| — | BB9 RS232 BREAKOUT BOW FOR 9 MFCS, POWER AND COMMUNICATION, 8 PIN DIN CONNECTOR, CABLES AND POWER SUPPLY NOT INCLUDED | Power Supply / Communication |
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SOFTWARE FOR GAS MIXTURES, |
SOFTWARE FOR GAS MIXTURES, UP TO 10 UNITS | Software |
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| — | SOFTWARE FOR UP TO 26 UNITS, RS232 OR RS485 | Software |
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VALVE, |
Nupro Shut-off Valve, 1/4" FVCR | Valve |
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