Overview
Thermal/resistive evaporation is a proven and economical method of depositing thin film coatings in vacuum. Materials such as iron, nickel, aluminum, copper, tin, silver, gold and platinum are frequently deposited using thermal evaporation methods. Resistive evaporation is used in various applications ranging from decorative coating to semiconductor manufacturing processes. KJLC offers a number of complete thermal evaporation solutions including filament, boat and crucible types. In addition to manufacturing these sources we have gained extensive experience in using them through our PVD systems manufacturing business.
Resistive Thermal Evaporator Kits
Our resistive thermal evaporator starter kits combine all of the necessary components required for thermal evaporation.
Each kit features
- Water cooled evaporation feedthrough posts (2 for single position, 3 for dual, 4 for three posn, and 5 for four posn)
- Universal clamping mechanism
- Shared evaporation “tree” for adjoining multiple sources
- Cross contamination shielding on multiple source models
- Choice of flange mounts
- Optional source shutter (NOTE: single source shutter is used for multiple sources)
Because each application is unique, the filaments, boats, and crucibles need to be specified separately. Power supplies should also be selected per the application. As always, custom solutions can be offered to fit specific requirements.
Mini EVP Flange-Mounted Thermal Evaporators
The KJLC Mini EVP is an economical way to add thermal evaporation capability to virtually any system.
Features:
- Filament or Coil/Crucible Style Sources (see chart below)
- 2 ¾”CF Flange Mount
- Vertical or Horizontal Mounting
- Optional post extension kit
- Optional linear transfer mechanism
HTE10 Evaporation Furnaces (to 1500° C)
Our High Temperature Evaporation (HTE) Furnace is a compact, and highly controllable method of evaporating materials with evaporation temperatures up to 1500°C. Because of their UHV compatible construction, HTE evaporators are an ideal alternative to the more expensive Knudsen cells.
Features
- Use for materials* up to 1500°C
- 10cc charge capacity
- Promotes a “directed” evaporation plume
- Compact design
- UHV compatible
- Al2O3 crucible provided with each HTE10
- Optional Quartz, Boron Nitride,Ta, W and Mo crucibles available
- Simple installation
- Integral Type C Thermocouple
- Optional flip shutter assy