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TORUS® 10 CA Performance Magnetron Production Cathodes
The KJLC® TORUS® 10 CA (center anode) production sputtering cathodes are designed specifically for applications using masks that are best attached directly to the sputter source. (ie. CD and DVD metallization)
The CD industry has long realized the benefits of our unique design, which features:
- Production style, high volume sputter source
- 6.37" diameter target with center anode design
- 6" round center anode design
- Dual race track designs
- High target material utilization
- High power versions available
- Isolated magnet assemblies
- A variety of mounting configurations
- RF, DC, or Pulsed-DC operation
Specifications Table
| Target Diam. | 6-3/6" |
| Target Thickness | 5/8" |
| RF, DC, Pulsed-DC | Yes |
| Power Density | >500 W/in2 |
| Direct Cooled Target | No |
| Indirect Cooled Target | Yes |
| Magnet Cooling | Indirect |
| Axial Mount (1.5" O.D. tube) | No |
| Flange Mount | Yes |
Dimensional Drawings
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